Inventor
SADEGHI HOSSEIN
US6 patents
Patents
6 patentsUS12537178B2Jan 27, 2026
Integrated hardware-software computer vision system for autonomous control and inspection of substrate processing systems
LAM RES CORP1 citations62
US11036202B2Jun 15, 2021
Real-time health monitoring of semiconductor manufacturing equipment
LAM RES CORP1 citations59
US12123709B2Oct 22, 2024
Measurement system to measure a thickness of an adjustable edge ring for a substrate processing system
LAM RES CORP0 citations56
US12217945B2Feb 4, 2025
Sorption chamber walls for semiconductor equipment
LAM RES CORP0 citations49
US12341040B2Jun 24, 2025
Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check
LAM RES CORP0 citations46
US12424470B2Sep 23, 2025
Systems and methods for autonomous process control and optimization of semiconductor equipment using light interferometry and reflectometry
LAM RES CORP0 citations45