Inventor
DING LILY
US3 patents
Patents
3 patentsUS5759901AJun 2, 1998
Fabrication method for sub-half micron CMOS transistor
VLSI TECHNOLOGY INC140 citations95
US5516707AMay 14, 1996
Large-tilted-angle nitrogen implant into dielectric regions overlaying source/drain regions of a transistor
VLSI TECHNOLOGY INC98 citations94
US5700717ADec 23, 1997
Method of reducing contact resistance for semiconductor manufacturing processes using tungsten plugs
VLSI TECHNOLOGY INC17 citations72