Inventor

AKIBA KEISHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “AKIBA KEISHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US5963834AOct 5, 1999

Method for forming a CVD film

TOKYO ELECTRON LTD62 citations94

YASKAWA DENKI SEISAKUSHO KK

1 patent

US7061508B1Jun 13, 2006

Loading pattern generating method

YASKAWA DENKI SEISAKUSHO KK15 citations77