Inventor
MANFREDI PAUL A
US11 patents
Patents
11 patentsUS6284092B1Sep 4, 2001
CMP slurry atomization slurry dispense system
IBM74 citations95
US5778481AJul 14, 1998
Silicon wafer cleaning and polishing pads
IBM102 citations93
US6432823B1Aug 13, 2002
Off-concentric polishing system design
IBM42 citations92
US6350183B2Feb 26, 2002
High pressure cleaning
IBM27 citations92
US6273797B1Aug 14, 2001
In-situ automated CMP wedge conditioner
IBM28 citations90
US6287178B1Sep 11, 2001
Wafer carrier rinsing mechanism
IBM22 citations89
US6186873B1Feb 13, 2001
Wafer edge cleaning
IBM49 citations89
US5745945AMay 5, 1998
Brush conditioner for a semiconductor cleaning brush
IBM46 citations89
US5894622AApr 20, 1999
Brush conditioner wing
IBM20 citations88
US6647579B2Nov 18, 2003
Brush pressure control system for chemical and mechanical treatment of semiconductor surfaces
IBM15 citations83
US6300246B1Oct 9, 2001
Method for chemical mechanical polishing of semiconductor wafer
IBM18 citations83