Inventor
LU DANNY
US7 patents
⚠️ This page may combine multiple inventors who share the name “LU DANNY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6352611B1Mar 5, 2002
Ceramic composition for an apparatus and method for processing a substrate
APPLIED MATERIALS INC97 citations98
US6123791ASep 26, 2000
Ceramic composition for an apparatus and method for processing a substrate
APPLIED MATERIALS INC118 citations98
US7371467B2May 13, 2008
Process chamber component having electroplated yttrium containing coating
APPLIED MATERIALS INC37 citations96
US6641697B2Nov 4, 2003
Substrate processing using a member comprising an oxide of a group IIIB metal
APPLIED MATERIALS INC53 citations96
US7833401B2Nov 16, 2010
Electroplating an yttrium-containing coating on a chamber component
APPLIED MATERIALS INC7 citations74
US6413389B1Jul 2, 2002
Method for recovering metal from etch by-products
APPLIED MATERIALS INC9 citations73