Inventor
YAGINUMA YASUYUKI
JP3 patents
Patents
3 patentsUS6689705B2Feb 10, 2004
Synthetic quartz glass optical material and optical member
HERAEUS QUARZGLAS9 citations72
US6480518B1Nov 12, 2002
Synthetic quartz glass member for use in ArF excimer laser lithography
HERAEUS QUARZGLAS11 citations72
US6266978B1Jul 31, 2001
Method for producing synthetic quartz glass for use in ArF excimer laser lithography
HERAEUS QUARZGLAS7 citations72