Inventor
NAGY EDWARD J
US7 patents
⚠️ This page may combine multiple inventors who share the name “NAGY EDWARD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CVC PRODUCTS INC
5 patentsUS6692575B1Feb 17, 2004
Apparatus for supporting a substrate in a reaction chamber
CVC PRODUCTS INC565 citations98
US6190732B1Feb 20, 2001
Method and system for dispensing process gas for fabricating a device on a substrate
CVC PRODUCTS INC126 citations98
US6508197B1Jan 21, 2003
Apparatus for dispensing gas for fabricating substrates
CVC PRODUCTS INC70 citations95
US6274495B1Aug 14, 2001
Method for fabricating a device on a substrate
CVC PRODUCTS INC40 citations95
US6544341B1Apr 8, 2003
System for fabricating a device on a substrate with a process gas
CVC PRODUCTS INC41 citations94