Inventor
SIEGFRIED DANIEL E
US11 patents
Patents
11 patentsUS7476869B2Jan 13, 2009
Gas distributor for ion source
VEECO INSTR INC9 citations82
US7439521B2Oct 21, 2008
Ion source with removable anode assembly
VEECO INSTR INC9 citations82
US7716021B2May 11, 2010
Grid transparency and grid hole pattern control for ion beam uniformity
VEECO INSTR INC11 citations80
US6919690B2Jul 19, 2005
Modular uniform gas distribution system in an ion source
VEECO INSTR INC16 citations80
US7342236B2Mar 11, 2008
Fluid-cooled ion source
VEECO INSTR INC8 citations72
US7425709B2Sep 16, 2008
Modular ion source
VEECO INSTR INC6 citations71
US6984942B2Jan 10, 2006
Longitudinal cathode expansion in an ion source
VEECO INSTR INC6 citations70
US7566883B2Jul 28, 2009
Thermal transfer sheet for ion source
VEECO INSTR INC3 citations60
US7425711B2Sep 16, 2008
Thermal control plate for ion source
VEECO INSTR INC5 citations60
US8374830B2Feb 12, 2013
Grid transparency and grid hole pattern control for ion beam uniformity
VEECO INSTR INC3 citations59
US7718983B2May 18, 2010
Sputtered contamination shielding for an ion source
VEECO INSTR INC3 citations59