Inventor
TOWNSEND SCOTT A
US9 patents
⚠️ This page may combine multiple inventors who share the name “TOWNSEND SCOTT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
8 patentsUS7476869B2Jan 13, 2009
Gas distributor for ion source
VEECO INSTR INC9 citations82
US7439521B2Oct 21, 2008
Ion source with removable anode assembly
VEECO INSTR INC9 citations82
US6919690B2Jul 19, 2005
Modular uniform gas distribution system in an ion source
VEECO INSTR INC16 citations80
US7342236B2Mar 11, 2008
Fluid-cooled ion source
VEECO INSTR INC8 citations72
US7425709B2Sep 16, 2008
Modular ion source
VEECO INSTR INC6 citations71
US6984942B2Jan 10, 2006
Longitudinal cathode expansion in an ion source
VEECO INSTR INC6 citations70
US7566883B2Jul 28, 2009
Thermal transfer sheet for ion source
VEECO INSTR INC3 citations60
US7425711B2Sep 16, 2008
Thermal control plate for ion source
VEECO INSTR INC5 citations60