Inventor
ZELENKOV VSEVOLOD
RU3 patents
Patents
3 patentsUS6919690B2Jul 19, 2005
Modular uniform gas distribution system in an ion source
VEECO INSTR INC16 citations80
US6984942B2Jan 10, 2006
Longitudinal cathode expansion in an ion source
VEECO INSTR INC6 citations70
US7718983B2May 18, 2010
Sputtered contamination shielding for an ion source
VEECO INSTR INC3 citations59