Inventor

VAN DE RUIT KEVIN

NL2 patents

Patents

2 patents

US11435673B2Sep 6, 2022

Method of determining a set of metrology points on a substrate, associated apparatus and computer program

ASML NETHERLANDS BV0 citations56

US10459354B2Oct 29, 2019

Lithographic apparatus and lithographic projection method

ASML NETHERLANDS BV0 citations34