Inventor
PAARHUIS BART DINAND
NL8 patents
⚠️ This page may combine multiple inventors who share the name “PAARHUIS BART DINAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS9989858B2Jun 5, 2018
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate
ASML NETHERLANDS BV5 citations82
US10444632B2Oct 15, 2019
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate
ASML NETHERLANDS BV0 citations50
US7963144B2Jun 21, 2011
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
ASML NETHERLANDS BV0 citations49
US7624617B2Dec 1, 2009
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
ASML NETHERLANDS BV0 citations49
US11762304B2Sep 19, 2023
Lithographic apparatus
ASML NETHERLANDS BV0 citations44
US10459354B2Oct 29, 2019
Lithographic apparatus and lithographic projection method
ASML NETHERLANDS BV0 citations34