Inventor
VAN DAMME JEAN-PHILIPPE XAVIER
BE10 patents
⚠️ This page may combine multiple inventors who share the name “VAN DAMME JEAN-PHILIPPE XAVIER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS10394139B2Aug 27, 2019
Patterning device cooling apparatus
ASML NETHERLANDS BV2 citations68
US10908517B2Feb 2, 2021
Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method
ASML NETHERLANDS BV0 citations60
US10495986B2Dec 3, 2019
Patterning device cooling system and method of thermally conditioning a patterning device
ASML NETHERLANDS BV1 citations60
US11036148B2Jun 15, 2021
Patterning device cooling system and method of thermally conditioning a patterning device
ASML NETHERLANDS BV0 citations59
US9507279B2Nov 29, 2016
Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV2 citations59
US12578658B2Mar 17, 2026
Systems, methods, and devices for thermal conditioning of reticles in lithographic apparatuses
ASML NETHERLANDS BV0 citations53
US10642166B2May 5, 2020
Patterning device cooling apparatus
ASML NETHERLANDS BV0 citations48
US10459354B2Oct 29, 2019
Lithographic apparatus and lithographic projection method
ASML NETHERLANDS BV0 citations34