Inventor

ONVLEE JOHANNES

NL43 patents

⚠️ This page may combine multiple inventors who share the name “ONVLEE JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ONVLEE JOHANNES

ASML NETHERLANDS BV

Lithographic apparatus, programmable patterning device and lithographic method

Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method

Lithography system, control system and device manufacturing method

Lithography system, control system and device manufacturing method

Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program

Inspection method and apparatus using same

Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program

Systems and methods for adjusting prediction models between facility locations

Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Particle detection device, lithographic apparatus and device manufacturing method

Substrate support, lithographic apparatus and loading method

Substrate support, lithographic apparatus and loading method

Lithographic projection assembly, substrate handling apparatus and substrate handling method

Particle detection device, lithographic apparatus and device manufacturing method

Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program

Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device

Lithographic apparatus and device manufacturing method

Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method

Controllable radiation lithographic apparatus and method

Estimating deformation of a patterning device and/or a change in its position

Lithographic apparatus and device manufacturing method

Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate

Gas flow optimization in reticle stage environment

Lithographic apparatus and lithographic projection method

ASML HOLDING NV

Reticle cooling system in a lithographic apparatus

Patterning device support, lithographic apparatus, and method of controlling patterning device temperature

Patterning device support, lithographic apparatus, and method of controlling patterning device temperature

Contaminant analyzing metrology system, lithographic apparatus, and methods thereof

Patterning device support, lithographic apparatus, and method of controlling patterning device temperature

Reticle cooling by non-uniform gas flow

ONVLEE JOHANNES

Substrate handling apparatus and lithographic apparatus

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

VAN ZWET ERWIN JOHN

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

DE JAGER PIETER WILLEM HERMAN

Lithographic apparatus, programmable patterning device and lithographic method

Lithographic apparatus, programmable patterning device and lithographic method

OCE NEDERLAND BV

Method of assigning a pertinent indication in respect of color behavior to a picture element to be imaged with a color reproduction system

BEST KEITH FRANK

Lithographic apparatus and method

AUER-JONGEPIER SUZAN L

Integrated post-exposure bake track