Inventor
BROUWER CORNELIS MELCHIOR
NL3 patents
Patents
3 patentsUS11347152B2May 31, 2022
Scan signal characterization diagnostics
ASML NETHERLANDS BV0 citations55
US11774861B2Oct 3, 2023
Calibration method for a lithographic system
ASML NETHERLANDS BV0 citations54
US10459354B2Oct 29, 2019
Lithographic apparatus and lithographic projection method
ASML NETHERLANDS BV0 citations34