Inventor
SCHUERMANN GREGOR M
CH3 patents
Patents
3 patentsUS7582490B2Sep 1, 2009
Controlled fabrication of gaps in electrically conducting structures
HARVARD COLLEGE62 citations96
US7435353B2Oct 14, 2008
Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
HARVARD COLLEGE19 citations91
US7524431B2Apr 28, 2009
Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers
HARVARD COLLEGE12 citations81