Inventor

GREENE ROBERT I

US10 patents

⚠️ This page may combine multiple inventors who share the name “GREENE ROBERT I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

5 patents

US6432255B1Aug 13, 2002

Method and apparatus for enhancing chamber cleaning

APPLIED MATERIALS INC436 citations99

US6942753B2Sep 13, 2005

Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition

APPLIED MATERIALS INC810 citations98

US6863077B2Mar 8, 2005

Method and apparatus for enhanced chamber cleaning

APPLIED MATERIALS INC8 citations74

US11692268B2Jul 4, 2023

Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition

APPLIED MATERIALS INC1 citations62

US7732010B2Jun 8, 2010

Method for supporting a glass substrate to improve uniform deposition thickness

APPLIED MATERIALS INC1 citations51

ITEK CORP

2 patents

US3954261AMay 4, 1976

Inked paper transport mechanism employing a pair of beveled rollers

ITEK CORP28 citations79

US4077715AMar 7, 1978

Adjustable optical cam

ITEK CORP6 citations62

APPLIED KOMATSU TECHNOLOGY INC

1 patent

US6355108B1Mar 12, 2002

Film deposition using a finger type shadow frame

APPLIED KOMATSU TECHNOLOGY INC90 citations97

CHOI SOO YOUNG

1 patent

US8795793B2Aug 5, 2014

Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition

CHOI SOO YOUNG16 citations92

MOTOROLA INC

1 patent

US5621763AApr 15, 1997

Apparatus and method for generating a transition between the on and off states of a radio frequency transmitter

MOTOROLA INC29 citations92