Inventor
PARK CHUNG-HEE
KR5 patents
Patents
5 patentsUS7514936B2Apr 7, 2009
Detection and suppression of electrical arcing
APPLIED MATERIALS INC59 citations96
US7292045B2Nov 6, 2007
Detection and suppression of electrical arcing
APPLIED MATERIALS INC45 citations94
US8372205B2Feb 12, 2013
Reducing electrostatic charge by roughening the susceptor
APPLIED MATERIALS INC2 citations62
US7589031B2Sep 15, 2009
Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films
APPLIED MATERIALS INC6 citations61
US7732010B2Jun 8, 2010
Method for supporting a glass substrate to improve uniform deposition thickness
APPLIED MATERIALS INC1 citations51