Inventor
NOGUCHI KAZUHIKO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “NOGUCHI KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
5 patentsUS5387843AFeb 7, 1995
Ion source having plasma chamber, an electron source, and a plasma power supply
MITSUBISHI ELECTRIC CORP35 citations90
US5132545AJul 21, 1992
Ion implantation apparatus
MITSUBISHI ELECTRIC CORP41 citations89
US5915172AJun 22, 1999
Method for manufacturing LCD and TFT
MITSUBISHI ELECTRIC CORP8 citations73
US5025167AJun 18, 1991
Ion implantation apparatus
MITSUBISHI ELECTRIC CORP8 citations73
US5329129AJul 12, 1994
Electron shower apparatus including filament current control
MITSUBISHI ELECTRIC CORP10 citations72