Inventor
ZAMA KAZUHIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “ZAMA KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS7925390B2Apr 12, 2011
Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space
HITACHI HIGH TECH CORP14 citations83
US7746461B2Jun 29, 2010
Optical defect inspection apparatus
HITACHI HIGH TECH CORP4 citations72
US7723709B2May 25, 2010
Substrate holding apparatus, and inspection or processing apparatus
HITACHI HIGH TECH CORP6 citations72
US7999242B2Aug 16, 2011
Substrate holding apparatus, and inspection or processing apparatus
HITACHI HIGH TECH CORP1 citations61
US7420668B2Sep 2, 2008
Wafer surface inspection apparatus and wafer surface inspection method
HITACHI HIGH TECH CORP3 citations60
US7894052B2Feb 22, 2011
Optical defect inspection apparatus
HITACHI HIGH TECH CORP0 citations50
ZAMA KAZUHIRO
3 patentsUS8686383B2Apr 1, 2014
Object holding apparatus, and inspection apparatus
ZAMA KAZUHIRO3 citations60
US8310667B2Nov 13, 2012
Wafer surface inspection apparatus and wafer surface inspection method
ZAMA KAZUHIRO4 citations59
US8183549B2May 22, 2012
Substrate holding apparatus, and inspection or processing apparatus
ZAMA KAZUHIRO0 citations49