Inventor
HAM DONG-SEOK
KR9 patents
⚠️ This page may combine multiple inventors who share the name “HAM DONG-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
8 patentsUS6679194B2Jan 20, 2004
Cassette table of a semiconductor fabricating apparatus
SAMSUNG ELECTRONICS CO LTD368 citations96
US7065898B2Jun 27, 2006
Module for transferring a substrate
SAMSUNG ELECTRONICS CO LTD19 citations83
US7320721B2Jan 22, 2008
Chemical filter and fan filter unit having the same
SAMSUNG ELECTRONICS CO LTD18 citations82
US6658917B2Dec 9, 2003
Air-sampling carrier, apparatus and method for analyzing air in a semiconductor process tool
SAMSUNG ELECTRONICS CO LTD7 citations73
US6874700B2Apr 5, 2005
Contamination control method and apparatus, and air-conditioning system of a substrate processing facility employing the same
SAMSUNG ELECTRONICS CO LTD5 citations62
US7846864B2Dec 7, 2010
Photocatalyst materials having semiconductor characteristics and methods for manufacturing and using the same
SAMSUNG ELECTRONICS CO LTD4 citations60
US7163573B2Jan 16, 2007
Chemical filter medium, chemical filter including the chemical filter medium and method for manufacturing the chemical filter
SAMSUNG ELECTRONICS CO LTD6 citations60
US7914594B2Mar 29, 2011
Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same
SAMSUNG ELECTRONICS CO LTD0 citations49