Inventor
LUQUE JORGE
US19 patents
⚠️ This page may combine multiple inventors who share the name “LUQUE JORGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
16 patentsUS10134569B1Nov 20, 2018
Method and apparatus for real-time monitoring of plasma chamber wall condition
LAM RES CORP22 citations93
US7239737B2Jul 3, 2007
User interface for quantifying wafer non-uniformities and graphically explore significance
LAM RES CORP36 citations92
US7738693B2Jun 15, 2010
User interface for wafer data analysis and visualization
LAM RES CORP11 citations83
US9735069B2Aug 15, 2017
Method and apparatus for determining process rate
LAM RES CORP5 citations72
US9640371B2May 2, 2017
System and method for detecting a process point in multi-mode pulse processes
LAM RES CORP2 citations72
US9548189B2Jan 17, 2017
Plasma etching systems and methods using empirical mode decomposition
LAM RES CORP2 citations72
US7018855B2Mar 28, 2006
Process controls for improved wafer uniformity using integrated or standalone metrology
LAM RES CORP7 citations68
US11056322B2Jul 6, 2021
Method and apparatus for determining process rate
LAM RES CORP0 citations62
US10242849B2Mar 26, 2019
System and method for detecting a process point in multi-mode pulse processes
LAM RES CORP1 citations62
US12360510B2Jul 15, 2025
Large spot spectral sensing to control spatial setpoints
LAM RES CORP0 citations61
US11791189B2Oct 17, 2023
Reflectometer to monitor substrate movement
LAM RES CORP0 citations56
US10504704B2Dec 10, 2019
Plasma etching systems and methods using empirical mode decomposition
LAM RES CORP0 citations51
US7945085B2May 17, 2011
User interface for wafer data analysis and visualization
LAM RES CORP0 citations51
US9941178B2Apr 10, 2018
Methods for detecting endpoint for through-silicon via reveal applications
LAM RES CORP0 citations48
US9543225B2Jan 10, 2017
Systems and methods for detecting endpoint for through-silicon via reveal applications
LAM RES CORP0 citations48
US10224187B1Mar 5, 2019
Detecting partial unclamping of a substrate from an ESC of a substrate processing system
LAM RES CORP0 citations46