Inventor · disambiguated record
Yuriko Shirai
Also filed as: SHIRAI YURIKO
4 granted patents·3 pending applications·0 citations·filing 2009–2018
52Inventor score
Top patents by PatentIndex Score
7 records- 0146US8216775B2Anti-reflection film forming material, and method for forming resist pattern using the sameSHIRAI YURIKO·Filed 2009·Granted Jul 10, 2012·0 cites·7 claims
- 0245US9535330B2Stripping solution for photolithography and pattern formation methodTOKYO OHKA KOGYO CO LTD·Filed 2012·Granted Jan 3, 2017·0 cites·3 claims
- 0343US8980534B2Method for forming fine pattern, and coating agent for pattern finingTOKYO OHKA KOGYO CO LTD·Filed 2013·Granted Mar 17, 2015·0 cites·4 claims
- 0442US10363585B2Cleaning solution, method of removing a removal target and method of etching a substrate using said cleaning solutionTOKYO OHKA KOGYO CO LTD·Filed 2017·Granted Jul 30, 2019·0 cites·9 claims
- 0538US2013122425A1Method for forming fine pattern, and coating forming agent for pattern finingTOKYO OHKA KOGYO CO LTD·Filed 2012·Application pending·0 cites
- 0635US2011065053A1Material for forming protective film and method for forming photoresist patternTOKYO OHKA KOGYO CO LTD·Filed 2010·Application pending·0 cites
- 0735US2018254182A1Surface treatment method and surface treatment liquidTOKYO OHKA KOGYO CO LTD·Filed 2018·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →