Inventor

YASHIMA SHINJI

JP8 patents

⚠️ This page may combine multiple inventors who share the name “YASHIMA SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

2 patents

US12014943B2Jun 18, 2024

Method of manufacturing semiconductor device and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations61

US11519815B2Dec 6, 2022

Method of manufacturing semiconductor device and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations61

AKAO TOKUNOBU

2 patents

US8486222B2Jul 16, 2013

Substrate processing apparatus and method of manufacturing a semiconductor device

AKAO TOKUNOBU3 citations57

US8557720B2Oct 15, 2013

Substrate processing apparatus and method of manufacturing a semiconductor device

AKAO TOKUNOBU1 citations47

TOMITA MASAYUKI

1 patent

US8471477B2Jun 25, 2013

Substrate processing apparatus and method of manufacturing semiconductor device

TOMITA MASAYUKI3 citations57

HITACHI INT ELECTRIC INC

1 patent

US7045447B2May 16, 2006

Semiconductor device producing method and semiconductor device producing apparatus including forming an oxide layer and changing the impedance or potential to form an oxynitride

HITACHI INT ELECTRIC INC2 citations57

OGAWA UNRYU

1 patent

US8987645B2Mar 24, 2015

Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same

OGAWA UNRYU2 citations53

YASHIMA SHINJI

1 patent

US9171724B2Oct 27, 2015

Substrate processing apparatus and method for manufacturing semiconductor device

YASHIMA SHINJI1 citations43