Inventor

MINAMI KAICHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “MINAMI KAICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AKAO TOKUNOBU

2 patents

US8486222B2Jul 16, 2013

Substrate processing apparatus and method of manufacturing a semiconductor device

AKAO TOKUNOBU3 citations57

US8557720B2Oct 15, 2013

Substrate processing apparatus and method of manufacturing a semiconductor device

AKAO TOKUNOBU1 citations47

OGAWA UNRYU

1 patent

US8987645B2Mar 24, 2015

Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same

OGAWA UNRYU2 citations53