P

Inventor

BENTLEY STEVEN

US63 patents
⚠️ This page may combine multiple inventors who share the name “BENTLEY STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES INC

36 patents
US9947804B1Apr 17, 2018

Methods of forming nanosheet transistor with dielectric isolation of source-drain regions and related structure

GLOBALFOUNDRIES INC154 citations99
US9991352B1Jun 5, 2018

Methods of forming a nano-sheet transistor device with a thicker gate stack and the resulting device

GLOBALFOUNDRIES INC90 citations98
US9773708B1Sep 26, 2017

Devices and methods of forming VFET with self-aligned replacement metal gates aligned to top spacer post top source drain EPI

GLOBALFOUNDRIES INC75 citations98
US10256158B1Apr 9, 2019

Insulated epitaxial structures in nanosheet complementary field effect transistors

GLOBALFOUNDRIES INC68 citations97
US8716156B1May 6, 2014

Methods of forming fins for a FinFET semiconductor device using a mandrel oxidation process

GLOBALFOUNDRIES INC60 citations97
US10217846B1Feb 26, 2019

Vertical field effect transistor formation with critical dimension control

GLOBALFOUNDRIES INC21 citations94
US9972494B1May 15, 2018

Method and structure to control channel length in vertical FET device

GLOBALFOUNDRIES INC38 citations94
US9825032B1Nov 21, 2017

Metal layer routing level for vertical FET SRAM and logic cell scaling

GLOBALFOUNDRIES INC41 citations94
US9805988B1Oct 31, 2017

Method of forming semiconductor structure including suspended semiconductor layer and resulting structure

GLOBALFOUNDRIES INC25 citations94
US9178036B1Nov 3, 2015

Methods of forming transistor devices with different threshold voltages and the resulting products

GLOBALFOUNDRIES INC45 citations94
US9165837B1Oct 20, 2015

Method to form defect free replacement fins by H2 anneal

GLOBALFOUNDRIES INC35 citations94
US9748335B1Aug 29, 2017

Method, apparatus and system for improved nanowire/nanosheet spacers

GLOBALFOUNDRIES INC18 citations92
US11201152B2Dec 14, 2021

Method, apparatus, and system for fin-over-nanosheet complementary field-effect-transistor

GLOBALFOUNDRIES INC12 citations84
US10283621B2May 7, 2019

Method of forming vertical field effect transistors with self-aligned gates and gate extensions and the resulting structure

GLOBALFOUNDRIES INC8 citations84
US10236379B2Mar 19, 2019

Vertical FET with self-aligned source/drain regions and gate length based on channel epitaxial growth process

GLOBALFOUNDRIES INC10 citations84
US10056377B2Aug 21, 2018

Metal layer routing level for vertical FET SRAM and logic cell scaling

GLOBALFOUNDRIES INC9 citations84
US9966456B1May 8, 2018

Methods of forming gate electrodes on a vertical transistor device

GLOBALFOUNDRIES INC14 citations84
US9613817B1Apr 4, 2017

Method of enhancing surface doping concentration of source/drain regions

GLOBALFOUNDRIES INC8 citations84
US10141414B1Nov 27, 2018

Negative capacitance matching in gate electrode structures

GLOBALFOUNDRIES INC12 citations83
US10157794B1Dec 18, 2018

Integrated circuit structure with stepped epitaxial region

GLOBALFOUNDRIES INC13 citations82
US9299775B2Mar 29, 2016

Methods for the production of integrated circuits comprising epitaxially grown replacement structures

GLOBALFOUNDRIES INC7 citations82
US10497798B2Dec 3, 2019

Vertical field effect transistor with self-aligned contacts

GLOBALFOUNDRIES INC2 citations73
US10312154B2Jun 4, 2019

Method of forming vertical FinFET device having self-aligned contacts

GLOBALFOUNDRIES INC4 citations73
US10249710B2Apr 2, 2019

Methods, apparatus, and system for improved nanowire/nanosheet spacers

GLOBALFOUNDRIES INC4 citations73
US9570588B2Feb 14, 2017

Methods of forming transistor structures including forming channel material after formation processes to prevent damage to the channel material

GLOBALFOUNDRIES INC4 citations73
US9530869B2Dec 27, 2016

Methods of forming embedded source/drain regions on finFET devices

GLOBALFOUNDRIES INC3 citations73
US9293324B2Mar 22, 2016

Methods of forming semiconductor devices including an electrically-decoupled fin

GLOBALFOUNDRIES INC4 citations73
US10475904B2Nov 12, 2019

Methods of forming merged source/drain regions on integrated circuit products

GLOBALFOUNDRIES INC5 citations72
US9368578B2Jun 14, 2016

Methods of forming substrates comprised of different semiconductor materials and the resulting device

GLOBALFOUNDRIES INC5 citations72
US9647086B2May 9, 2017

Early PTS with buffer for channel doping control

GLOBALFOUNDRIES INC5 citations71
US9406803B2Aug 2, 2016

FinFET device including a uniform silicon alloy fin

GLOBALFOUNDRIES INC2 citations63
US9305846B2Apr 5, 2016

Device isolation in FinFET CMOS

GLOBALFOUNDRIES INC2 citations63
US10446451B1Oct 15, 2019

Method for forming replacement gate structures for vertical transistors

GLOBALFOUNDRIES INC1 citations62
US10332969B2Jun 25, 2019

Negative capacitance matching in gate electrode structures

GLOBALFOUNDRIES INC1 citations62
US10446659B2Oct 15, 2019

Negative capacitance integration through a gate contact

GLOBALFOUNDRIES INC1 citations61
US10685847B2Jun 16, 2020

Vertical nanowires formed on upper fin surface

GLOBALFOUNDRIES INC0 citations52

IBM

10 patents

GLOBALFOUNDRIES US INC

4 patents

Showing the top 50 of 63 patents by PatentIndex Score.