Inventor
BENTLEY STEVEN
US63 patents
⚠️ This page may combine multiple inventors who share the name “BENTLEY STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
36 patentsUS9947804B1Apr 17, 2018
Methods of forming nanosheet transistor with dielectric isolation of source-drain regions and related structure
GLOBALFOUNDRIES INC154 citations99
US9991352B1Jun 5, 2018
Methods of forming a nano-sheet transistor device with a thicker gate stack and the resulting device
GLOBALFOUNDRIES INC90 citations98
US9773708B1Sep 26, 2017
Devices and methods of forming VFET with self-aligned replacement metal gates aligned to top spacer post top source drain EPI
GLOBALFOUNDRIES INC75 citations98
US10256158B1Apr 9, 2019
Insulated epitaxial structures in nanosheet complementary field effect transistors
GLOBALFOUNDRIES INC68 citations97
US8716156B1May 6, 2014
Methods of forming fins for a FinFET semiconductor device using a mandrel oxidation process
GLOBALFOUNDRIES INC60 citations97
US10217846B1Feb 26, 2019
Vertical field effect transistor formation with critical dimension control
GLOBALFOUNDRIES INC21 citations94
US9972494B1May 15, 2018
Method and structure to control channel length in vertical FET device
GLOBALFOUNDRIES INC38 citations94
US9825032B1Nov 21, 2017
Metal layer routing level for vertical FET SRAM and logic cell scaling
GLOBALFOUNDRIES INC41 citations94
US9805988B1Oct 31, 2017
Method of forming semiconductor structure including suspended semiconductor layer and resulting structure
GLOBALFOUNDRIES INC25 citations94
US9178036B1Nov 3, 2015
Methods of forming transistor devices with different threshold voltages and the resulting products
GLOBALFOUNDRIES INC45 citations94
US9165837B1Oct 20, 2015
Method to form defect free replacement fins by H2 anneal
GLOBALFOUNDRIES INC35 citations94
US9748335B1Aug 29, 2017
Method, apparatus and system for improved nanowire/nanosheet spacers
GLOBALFOUNDRIES INC18 citations92
US11201152B2Dec 14, 2021
Method, apparatus, and system for fin-over-nanosheet complementary field-effect-transistor
GLOBALFOUNDRIES INC12 citations84
US10283621B2May 7, 2019
Method of forming vertical field effect transistors with self-aligned gates and gate extensions and the resulting structure
GLOBALFOUNDRIES INC8 citations84
US10236379B2Mar 19, 2019
Vertical FET with self-aligned source/drain regions and gate length based on channel epitaxial growth process
GLOBALFOUNDRIES INC10 citations84
US10056377B2Aug 21, 2018
Metal layer routing level for vertical FET SRAM and logic cell scaling
GLOBALFOUNDRIES INC9 citations84
US9966456B1May 8, 2018
Methods of forming gate electrodes on a vertical transistor device
GLOBALFOUNDRIES INC14 citations84
US9613817B1Apr 4, 2017
Method of enhancing surface doping concentration of source/drain regions
GLOBALFOUNDRIES INC8 citations84
US10141414B1Nov 27, 2018
Negative capacitance matching in gate electrode structures
GLOBALFOUNDRIES INC12 citations83
US10157794B1Dec 18, 2018
Integrated circuit structure with stepped epitaxial region
GLOBALFOUNDRIES INC13 citations82
US9299775B2Mar 29, 2016
Methods for the production of integrated circuits comprising epitaxially grown replacement structures
GLOBALFOUNDRIES INC7 citations82
US10497798B2Dec 3, 2019
Vertical field effect transistor with self-aligned contacts
GLOBALFOUNDRIES INC2 citations73
US10312154B2Jun 4, 2019
Method of forming vertical FinFET device having self-aligned contacts
GLOBALFOUNDRIES INC4 citations73
US10249710B2Apr 2, 2019
Methods, apparatus, and system for improved nanowire/nanosheet spacers
GLOBALFOUNDRIES INC4 citations73
US9570588B2Feb 14, 2017
Methods of forming transistor structures including forming channel material after formation processes to prevent damage to the channel material
GLOBALFOUNDRIES INC4 citations73
US9530869B2Dec 27, 2016
Methods of forming embedded source/drain regions on finFET devices
GLOBALFOUNDRIES INC3 citations73
US9293324B2Mar 22, 2016
Methods of forming semiconductor devices including an electrically-decoupled fin
GLOBALFOUNDRIES INC4 citations73
US10475904B2Nov 12, 2019
Methods of forming merged source/drain regions on integrated circuit products
GLOBALFOUNDRIES INC5 citations72
US9368578B2Jun 14, 2016
Methods of forming substrates comprised of different semiconductor materials and the resulting device
GLOBALFOUNDRIES INC5 citations72
US9647086B2May 9, 2017
Early PTS with buffer for channel doping control
GLOBALFOUNDRIES INC5 citations71
US9406803B2Aug 2, 2016
FinFET device including a uniform silicon alloy fin
GLOBALFOUNDRIES INC2 citations63
US9305846B2Apr 5, 2016
Device isolation in FinFET CMOS
GLOBALFOUNDRIES INC2 citations63
US10446451B1Oct 15, 2019
Method for forming replacement gate structures for vertical transistors
GLOBALFOUNDRIES INC1 citations62
US10332969B2Jun 25, 2019
Negative capacitance matching in gate electrode structures
GLOBALFOUNDRIES INC1 citations62
US10446659B2Oct 15, 2019
Negative capacitance integration through a gate contact
GLOBALFOUNDRIES INC1 citations61
US10685847B2Jun 16, 2020
Vertical nanowires formed on upper fin surface
GLOBALFOUNDRIES INC0 citations52
IBM
10 patentsUS10388760B1Aug 20, 2019
Sub-thermal switching slope vertical field effect transistor with dual-gate feedback loop mechanism
IBM4 citations84
US10741675B2Aug 11, 2020
Sub-thermal switching slope vertical field effect transistor with dual-gate feedback loop mechanism
IBM1 citations73
US10243073B2Mar 26, 2019
Vertical channel field-effect transistor (FET) process compatible long channel transistors
IBM2 citations73
US10916650B2Feb 9, 2021
Uniform bottom spacer for VFET devices
IBM0 citations63
US10896972B2Jan 19, 2021
Self-aligned contact for vertical field effect transistor
IBM0 citations63
US10756203B2Aug 25, 2020
Sub-thermal switching slope vertical field effect transistor with dual-gate feedback loop mechanism
IBM0 citations52
US10622458B2Apr 14, 2020
Self-aligned contact for vertical field effect transistor
IBM0 citations52
US10622475B2Apr 14, 2020
Uniform bottom spacer for VFET devices
IBM0 citations52
US10553705B2Feb 4, 2020
Sub-thermal switching slope vertical field effect transistor with dual-gate feedback loop mechanism
IBM0 citations52
US10546945B2Jan 28, 2020
Sub-thermal switching slope vertical field effect transistor with dual-gate feedback loop mechanism
IBM0 citations52
GLOBALFOUNDRIES US INC
4 patentsUS11515397B2Nov 29, 2022
III-V compound semiconductor layer stacks with electrical isolation provided by a trap-rich layer
GLOBALFOUNDRIES US INC1 citations63
US11616127B2Mar 28, 2023
Symmetric arrangement of field plates in semiconductor devices
GLOBALFOUNDRIES US INC0 citations61
US11316019B2Apr 26, 2022
Symmetric arrangement of field plates in semiconductor devices
GLOBALFOUNDRIES US INC0 citations61
US11569170B2Jan 31, 2023
Substrate with a buried conductor under an active region for enhanced thermal conductivity and RF shielding
GLOBALFOUNDRIES US INC0 citations60
Showing the top 50 of 63 patents by PatentIndex Score.