Inventor

CHUANG YUNG-HO ALEX

US79 patents

⚠️ This page may combine multiple inventors who share the name “CHUANG YUNG-HO ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHUANG YUNG-HO ALEX

KLA TENCOR CORP

TDI sensor in a darkfield system

Method and system for determining one or more optical characteristics of structure of a semiconductor wafer

Photocathode including silicon substrate with boron layer

Back-illuminated sensor with boron layer

Semiconductor inspection and metrology system using laser pulse multiplier

Anti-reflection layer for back-illuminated sensor

Metrology systems and methods

Metrology systems and methods

High brightness laser-sustained plasma broadband source

Photocathode including field emitter array on a silicon substrate with boron layer

Passivation of nonlinear optical crystals

Anti-reflection layer for back-illuminated sensor

Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors

Electron source

183NM laser and inspection system

Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population

Image sensor, an inspection system and a method of inspecting an article

Scanning electron microscope and methods of inspecting and reviewing samples

Back-illuminated sensor with boron layer

183 nm CW laser and inspection system

Back-illuminated sensor with boron layer

Sensor with electrically controllable aperture for inspection and metrology systems

Back-illuminated sensor with boron layer

Scanning electron microscope and methods of inspecting and reviewing samples

Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms

Back-illuminated sensor and a method of manufacturing a sensor

Electron source

Photocathode including silicon substrate with boron layer

183NM laser and inspection system

Image sensor, an inspection system and a method of inspecting an article

Laser assembly and inspection system using monolithic bandwidth narrowing apparatus

Multi-stage ramp-up annealing for frequency-conversion crystals

Process aware metrology

Overlay metrology system and method

183 nm CW laser and inspection system

Semiconductor inspection and metrology system using laser pulse multiplier

Interposer based imaging sensor for high-speed image acquisition and inspection systems

Dual-column-parallel CCD sensor and inspection systems using a sensor

Dark-field inspection using a low-noise sensor

KLA CORP

Strontium tetraborate as optical coating material

Frequency conversion using stacked strontium tetraborate plates

Back-illuminated sensor and a method of manufacturing a sensor

Frequency conversion using interdigitated nonlinear crystal gratings

Frequency conversion using stacked strontium tetraborate plates

Strontium tetraborate as optical coating material

Electron gun and electron microscope

Back-illuminated sensor and a method of manufacturing a sensor using a silicon on insulator wafer

DRIBINSKI VLADIMIR

Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal

KANDEL DANIEL

Metrology systems and methods

LIU XUEFENG

Process aware metrology