Inventor

Xiao-Li Yinying

US20 patents

⚠️ This page may combine multiple inventors who share the name “Xiao-Li Yinying”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

Xiao-Li Yinying

KLA CORP

Strontium tetraborate as optical coating material

Frequency conversion using stacked strontium tetraborate plates

Frequency conversion using interdigitated nonlinear crystal gratings

Frequency conversion using stacked strontium tetraborate plates

Strontium tetraborate as optical coating material

Electron gun and electron microscope

Light modulated electron source

Light modulated electron source

Strontium tetraborate as optical glass material

Broadband ultraviolet illumination sources

Broadband ultraviolet illumination sources

United states frequency conversion using interdigitated nonlinear crystal gratings

Electron gun and electron microscope

Tunable DUV laser assembly

Deep ultraviolet laser using strontium tetraborate for frequency conversion

KLA TENCOR CORP

Photocathode including field emitter array on a silicon substrate with boron layer

Electron source

Electron source

Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer

Overlay metrology system and method