Inventor

KADAVANICH ANDREAS

US4 patents

⚠️ This page may combine multiple inventors who share the name “KADAVANICH ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

2 patents

US7232767B2Jun 19, 2007

Slotted electrostatic shield modification for improved etch and CVD process uniformity

MATTSON TECH INC25 citations92

US7799685B2Sep 21, 2010

System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing

MATTSON TECH INC16 citations82

NAGORNY VLADIMIR

1 patent

US9653264B2May 16, 2017

Inductively coupled plasma source for plasma processing

NAGORNY VLADIMIR9 citations81

GEORGE RENE

1 patent

US8413604B2Apr 9, 2013

Slotted electrostatic shield modification for improved etch and CVD process uniformity

GEORGE RENE2 citations56