Inventor
TAM NORMAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “TAM NORMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS7509035B2Mar 24, 2009
Lamp array for thermal processing exhibiting improved radial uniformity
APPLIED MATERIALS INC37 citations88
US9659809B2May 23, 2017
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC6 citations83
US7951728B2May 31, 2011
Method of improving oxide growth rate of selective oxidation processes
APPLIED MATERIALS INC7 citations83
US7947561B2May 24, 2011
Methods for oxidation of a semiconductor device
APPLIED MATERIALS INC14 citations83
US10128144B2Nov 13, 2018
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC2 citations72
US6828234B2Dec 7, 2004
RTP process chamber pressure control
APPLIED MATERIALS INC10 citations69
US9385004B2Jul 5, 2016
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC1 citations62