Inventor
WEICHART JURGEN
LI14 patents
⚠️ This page may combine multiple inventors who share the name “WEICHART JURGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EVATEC AG
10 patentsUS10388559B2Aug 20, 2019
Apparatus for depositing a layer on a substrate in a processing gas
EVATEC AG13 citations80
US10580671B2Mar 3, 2020
Chamber for degassing substrates
EVATEC AG1 citations71
US10403522B2Sep 3, 2019
Chamber for degassing substrates
EVATEC AG2 citations71
US11217434B2Jan 4, 2022
RF capacitive coupled dual frequency etch reactor
EVATEC AG2 citations67
US11776825B2Oct 3, 2023
Chamber for degassing substrates
EVATEC AG2 citations65
US11211234B2Dec 28, 2021
Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)
EVATEC AG0 citations61
US9934992B2Apr 3, 2018
Chamber for degassing substrates
EVATEC AG1 citations61
US11742187B2Aug 29, 2023
RF capacitive coupled etch reactor
EVATEC AG0 citations57
US11469085B2Oct 11, 2022
Vacuum plasma workpiece treatment apparatus
EVATEC AG0 citations57
US11145495B2Oct 12, 2021
Vacuum treatment chamber and method of manufacturing a vacuum treated plate-shaped substrate
EVATEC AG0 citations48