Inventor
BOGAART ERIK WILLEM
NL12 patents
⚠️ This page may combine multiple inventors who share the name “BOGAART ERIK WILLEM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS9778025B2Oct 3, 2017
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV21 citations94
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US9696638B2Jul 4, 2017
Lithographic apparatus
ASML NETHERLANDS BV3 citations72
US9983485B2May 29, 2018
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV2 citations71
US10585363B2Mar 10, 2020
Alignment system
ASML NETHERLANDS BV4 citations70
US11169447B2Nov 9, 2021
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV0 citations61
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US9835954B2Dec 5, 2017
Inspection method and apparatus, substrates for use therein and device manufacturing method
ASML NETHERLANDS BV1 citations52
US9229340B2Jan 5, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10754258B2Aug 25, 2020
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV0 citations50
US10042260B2Aug 7, 2018
Device for monitoring a radiation source, radiation source, method of monitoring a radiation source, device manufacturing method
ASML NETHERLANDS BV0 citations46