Inventor
BRUIJN MARC
NL5 patents
Patents
5 patentsUS10539886B2Jan 21, 2020
Pellicle attachment apparatus
ASML NETHERLANDS BV13 citations90
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US11003098B2May 11, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US10969701B2Apr 6, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59