Inventor

VAN LOO JÉRÔME FRANÇOIS SYLVAIN VIRGILE

NL5 patents

Patents

5 patents

US10539886B2Jan 21, 2020

Pellicle attachment apparatus

ASML NETHERLANDS BV13 citations90

US10558129B2Feb 11, 2020

Mask assembly

ASML NETHERLANDS BV7 citations82

US11009803B2May 18, 2021

Mask assembly

ASML NETHERLANDS BV0 citations60

US11003098B2May 11, 2021

Pellicle attachment apparatus

ASML NETHERLANDS BV0 citations59

US10969701B2Apr 6, 2021

Pellicle attachment apparatus

ASML NETHERLANDS BV0 citations59