Inventor
DEUFEL PETER
DE10 patents
⚠️ This page may combine multiple inventors who share the name “DEUFEL PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS11003088B2May 11, 2021
Method and device for the correction of imaging defects
ZEISS CARL SMT GMBH6 citations83
US10620543B2Apr 14, 2020
Method and device for the correction of imaging defects
ZEISS CARL SMT GMBH0 citations51
US10108094B2Oct 23, 2018
Projection exposure apparatus with near-field manipulator
ZEISS CARL SMT GMBH0 citations49
US10571813B2Feb 25, 2020
Connection arrangement for a force-fit connection between ceramic components
ZEISS CARL SMT GMBH0 citations46
US8018664B2Sep 13, 2011
Housing structure
ZEISS CARL SMT GMBH1 citations43
US9551944B2Jan 24, 2017
Method for replacing objective parts
ZEISS CARL SMT GMBH0 citations39