Inventor
FURUSATO HIROSHI
JP7 patents
Patents
7 patentsUS12224549B2Feb 11, 2025
Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices
GIGAPHOTON INC0 citations59
US11271361B2Mar 8, 2022
Excimer laser apparatus and method for manufacturing electronic device
GIGAPHOTON INC0 citations48
US10283927B2May 7, 2019
Line narrowed laser apparatus
GIGAPHOTON INC0 citations48
US12155168B2Nov 26, 2024
Line narrowing gas laser device and electronic device manufacturing method
GIGAPHOTON INC0 citations46
US11081853B2Aug 3, 2021
Optical element moving apparatus, narrowed-line laser apparatus, and method for manufacturing electronic device
GIGAPHOTON INC0 citations45
US10615565B2Apr 7, 2020
Line narrowed laser apparatus
GIGAPHOTON INC0 citations40
US10741991B2Aug 11, 2020
Narrowband laser apparatus and spectral linewidth measuring apparatus
GIGAPHOTON INC0 citations39