Inventor
YANG SUNYOUNG
KR3 patents
Patents
3 patentsUS11409197B2Aug 9, 2022
Hardmask composition, hardmask layer and method of forming patterns
SAMSUNG SDI CO LTD1 citations57
US11214678B2Jan 4, 2022
Hardmask composition, hardmask layer and method of forming patterns
SAMSUNG SDI CO LTD0 citations46
US10556986B2Feb 11, 2020
Polymer, organic layer composition, and method of forming patterns
SAMSUNG SDI CO LTD0 citations32