Inventor
COENEN TEIS JOHAN
NL11 patents
Patents
11 patentsUS9728931B2Aug 8, 2017
Electron injector and free electron laser
ASML NETHERLANDS BV5 citations81
US9853412B2Dec 26, 2017
Radiation source
ASML NETHERLANDS BV4 citations69
US12140875B2Nov 12, 2024
Metrology measurement method and apparatus
ASML NETHERLANDS BV2 citations68
US10996568B2May 4, 2021
Methods and apparatus for metrology
ASML NETHERLANDS BV1 citations60
US10670974B2Jun 2, 2020
Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate
ASML NETHERLANDS BV1 citations60
US11996267B2May 28, 2024
Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system
ASML NETHERLANDS BV1 citations58
US12399428B2Aug 26, 2025
Method and apparatus for forming a patterned layer of material
ASML NETHERLANDS BV0 citations57
US11353796B2Jun 7, 2022
Method and apparatus for determining a radiation beam intensity profile
ASML NETHERLANDS BV0 citations56
US12325911B2Jun 10, 2025
Method and apparatus for forming a patterned layer of material
ASML NETHERLANDS BV0 citations54
US10725387B2Jul 28, 2020
Determining an edge roughness parameter of a periodic structure
ASML NETHERLANDS BV0 citations49
US10103508B2Oct 16, 2018
Electron injector and free electron laser
ASML NETHERLANDS BV0 citations49