Inventor
LO YEN-CHAN
TW3 patents
Patents
3 patentsUS10161041B2Dec 25, 2018
Thermal chemical vapor deposition system and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations79
US10626499B2Apr 21, 2020
Deposition device structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations57
US10724140B2Jul 28, 2020
Thermal chemical vapor deposition system and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47