Inventor
CHEN HUAN-CHIEH
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHEN HUAN-CHIEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11859284B2Jan 2, 2024
Shower head structure and plasma processing apparatus using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations64
US12150394B2Nov 19, 2024
Memory device structure for reducing thermal crosstalk
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US10626499B2Apr 21, 2020
Deposition device structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations57
US12215422B2Feb 4, 2025
Shower head structure and plasma processing apparatus using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US11214868B2Jan 4, 2022
Chemical vapor deposition apparatus and blocker plate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50