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Inventor
SUN CHIN-FENG
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “SUN CHIN-FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
1 patent
US10626499B2
Apr 21, 2020
Deposition device structure
TAIWAN SEMICONDUCTOR MFG CO LTD
1 citations
57
TAIWAN SEMICONDUCTOR MFG
1 patent
US8946095B2
Feb 3, 2015
Method of forming interlayer dielectric film above metal gate of semiconductor device
TAIWAN SEMICONDUCTOR MFG
1 citations
49