Inventor

LEU PO-HSIUNG

TW23 patents

⚠️ This page may combine multiple inventors who share the name “LEU PO-HSIUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEU PO-HSIUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Showerhead, semicondcutor processing apparatus having the same and semiconductor process

Thermal chemical vapor deposition system and operating method thereof

Method for controlling plasma in semiconductor fabrication

Coating apparatus and method of forming coating film

Coating apparatus and method of forming coating film

Deposition device structure

Gap fill self planarization on post EPI

Gap fill self planarization on post EPI

Semiconductor device having a shallow trench isolation structure and methods of forming the same

Semiconductor structure with anti-etch structure in via and method for manufacturing the same

Method and system for controlling plasma in semiconductor fabrication

Thin film deposition apparatus with multi chamber design and film deposition methods

Profile pre-shaping for replacement poly gate interlayer dielectric

Semiconductor device having a shallow trench isolation structure and methods of forming the same

Thermal chemical vapor deposition system and operating method thereof

Semiconductor structure with protection layer

High density plasma reactor with multiple top coils

TAIWAN SEMICONDUCTOR MFG

Metal gate transistor and method for tuning metal gate profile

Solution for copper hillock induced by thermal strain with buffer zone for strain relaxation

Method of forming interlayer dielectric film above metal gate of semiconductor device

CHANG JEN-CHI

Interlayer dielectric structure with high aspect ratio process (HARP)

CHIANG CHIH-WEI

Profile pre-shaping for replacement poly gate interlayer dielectric

WANG LAN-HAI

Apparatus for dielectric deposition process