Inventor
KANG MIYEONG
KR4 patents
Patents
4 patentsUS12405532B2Sep 2, 2025
Polymer and composition for forming an anti-reflective film and method of manufacturing an integrated circuit device using the anti-reflective film
SAMSUNG ELECTRONICS CO LTD0 citations52
US11650502B2May 16, 2023
Polymer and composition for forming an anti-reflective film and method of manufacturing an integrated circuit device using the anti-reflective film
SAMSUNG ELECTRONICS CO LTD0 citations52
US10381361B2Aug 13, 2019
Method for manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations33
US10319735B2Jun 11, 2019
Method for manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations32