P

Inventor

GLUSHKOV DENIS ALEXANDROVICH

NL13 patents
⚠️ This page may combine multiple inventors who share the name “GLUSHKOV DENIS ALEXANDROVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RND ISAN LTD

4 patents
US10964523B1Mar 30, 2021

Laser-pumped plasma light source and method for light generation

RND ISAN LTD8 citations80
US11875986B2Jan 16, 2024

Laser-pumped light source and method for laser ignition of plasma

RND ISAN LTD0 citations47
US11503696B2Nov 15, 2022

Broadband laser-pumped plasma light source

RND ISAN LTD0 citations47
US11191147B2Nov 30, 2021

High-brightness laser-pumped plasma light source

RND ISAN LTD0 citations47

ASML NETHERLANDS BV

2 patents
US9964852B1May 8, 2018

Source collector apparatus, lithographic apparatus and method

ASML NETHERLANDS BV0 citations45
US9841680B2Dec 12, 2017

Source collector apparatus, lithographic apparatus and method

ASML NETHERLANDS BV0 citations45

GLUSHKOV DENIS ALEXANDROVICH

2 patents
US9307624B2Apr 5, 2016

Lithographic apparatus

GLUSHKOV DENIS ALEXANDROVICH0 citations42
US9082521B2Jul 14, 2015

EUV multilayer mirror with interlayer and lithographic apparatus using the mirror

GLUSHKOV DENIS ALEXANDROVICH1 citations40

ISTEQ B V

1 patent
US9476841B1Oct 25, 2016

High-brightness LPP EUV light source

ISTEQ B V22 citations88

SJMAENOK LEONID AIZIKOVITCH

1 patent
US9897930B2Feb 20, 2018

Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element

SJMAENOK LEONID AIZIKOVITCH14 citations81

YAKUNIN ANDREI MIKHAILOVICH

1 patent
US9448492B2Sep 20, 2016

Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus

YAKUNIN ANDREI MIKHAILOVICH2 citations55

EUV LABS LTD

1 patent
US11869742B2Jan 9, 2024

X-ray source with rotating liquid-metal target

EUV LABS LTD1 citations53

WUISTER SANDER FREDERIK

1 patent
US8454849B2Jun 4, 2013

Imprint lithography

WUISTER SANDER FREDERIK0 citations47