Inventor
KANARIK KEREN J
US4 patents
Patents
4 patentsUS12119243B2Oct 15, 2024
Plasma etching chemistries of high aspect ratio features in dielectrics
LAM RES CORP1 citations71
US11594429B2Feb 28, 2023
Plasma etching chemistries of high aspect ratio features in dielectrics
LAM RES CORP1 citations71
US12550660B2Feb 10, 2026
Plasma etching chemistries of high aspect ratio features in dielectrics
LAM RES CORP0 citations61
US7951616B2May 31, 2011
Process for wafer temperature verification in etch tools
LAM RES CORP2 citations61