Inventor
SPENGLER CHRISTOPH
AT11 patents
⚠️ This page may combine multiple inventors who share the name “SPENGLER CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IMS NANOFABRICATION GMBH
10 patentsUS10651010B2May 12, 2020
Non-linear dose- and blur-dependent edge placement correction
IMS NANOFABRICATION GMBH7 citations82
US10522329B2Dec 31, 2019
Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus
IMS NANOFABRICATION GMBH13 citations82
US10840054B2Nov 17, 2020
Charged-particle source and method for cleaning a charged-particle source using back-sputtering
IMS NANOFABRICATION GMBH7 citations81
US10325757B2Jun 18, 2019
Advanced dose-level quantization of multibeam-writers
IMS NANOFABRICATION GMBH9 citations78
US11569064B2Jan 31, 2023
Method for irradiating a target using restricted placement grids
IMS NANOFABRICATION GMBH2 citations71
US11099482B2Aug 24, 2021
Adapting the duration of exposure slots in multi-beam writers
IMS NANOFABRICATION GMBH3 citations68
US12040157B2Jul 16, 2024
Pattern data processing for programmable direct-write apparatus
IMS NANOFABRICATION GMBH2 citations66
US11735391B2Aug 22, 2023
Charged-particle source
IMS NANOFABRICATION GMBH2 citations65
US12481214B2Nov 25, 2025
Correction of blur variation in a multi-beam writer
IMS NANOFABRICATION GMBH0 citations45
US12500060B2Dec 16, 2025
Electromagnetic lens
IMS NANOFABRICATION GMBH0 citations37