Inventor
NAETAR WOLF
AT5 patents
Patents
5 patentsUS10651010B2May 12, 2020
Non-linear dose- and blur-dependent edge placement correction
IMS NANOFABRICATION GMBH7 citations82
US10522329B2Dec 31, 2019
Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus
IMS NANOFABRICATION GMBH13 citations82
US11569064B2Jan 31, 2023
Method for irradiating a target using restricted placement grids
IMS NANOFABRICATION GMBH2 citations71
US11099482B2Aug 24, 2021
Adapting the duration of exposure slots in multi-beam writers
IMS NANOFABRICATION GMBH3 citations68
US12481214B2Nov 25, 2025
Correction of blur variation in a multi-beam writer
IMS NANOFABRICATION GMBH0 citations45