Inventor
JUDELL NEIL H
US7 patents
⚠️ This page may combine multiple inventors who share the name “JUDELL NEIL H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADE CORP
4 patentsUS4750141AJun 7, 1988
Method and apparatus for separating fixture-induced error from measured object characteristics and for compensating the measured object characteristic with the error, and a bow/warp station implementing same
ADE CORP105 citations95
US4457664AJul 3, 1984
Wafer alignment station
ADE CORP133 citations94
US4860229AAug 22, 1989
Wafer flatness station
ADE CORP42 citations92
US4849916AJul 18, 1989
Improved spatial resolution measurement system and method
ADE CORP24 citations92