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Inventor
HOLVE DONALD J
US
4 patents
⚠️ This page may combine multiple inventors who share the name “HOLVE DONALD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INSITEC INC
1 patent
US5943130A
Aug 24, 1999
In situ sensor for near wafer particle monitoring in semiconductor device manufacturing equipment
INSITEC INC
70 citations
90
UNIV ARIZONA
1 patent
US5101113A
Mar 31, 1992
Ensemble scattering particle sizing system with axial spatial resolution
UNIV ARIZONA
52 citations
89
INSITEC MEASUREMENT SYSTEMS
1 patent
US5619324A
Apr 8, 1997
Method for measuring particle size in the presence of multiple scattering
INSITEC MEASUREMENT SYSTEMS
40 citations
84
INFICON INC
1 patent
US6906799B2
Jun 14, 2005
Signal processing method for in-situ, scanned-beam particle monitoring
INFICON INC
6 citations
54