Inventor
JIMBO SADAYUKI
JP6 patents
Patents
6 patentsUS5302240AApr 12, 1994
Method of manufacturing semiconductor device
TOSHIBA KK200 citations99
US5756402AMay 26, 1998
Method of etching silicon nitride film
TOSHIBA KK250 citations97
US5445710AAug 29, 1995
Method of manufacturing semiconductor device
TOSHIBA KK86 citations96
US5240554AAug 31, 1993
Method of manufacturing semiconductor device
TOSHIBA KK59 citations96
US9865680B2Jan 9, 2018
Semiconductor device with peripheral void space and method of making the same
TOSHIBA KK9 citations83
US10020362B2Jul 10, 2018
Semiconductor device and method of manufacturing the same
TOSHIBA KK0 citations51